LED UV lights for Exposure Machine Series
LED UV lights for Exposure Machine Series
LED UV lights for Exposure Machine Series
LED UV lights for Exposure Machine Series
LED UV lights for Exposure Machine Series
LED UV lights for Exposure Machine Series

LED UV lights for Exposure Machine Series

Regular price
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LED UV lights for Exposure Machine Series are sutiable for Auto -inline model, Auto, Manual, Semi Auto Exposure machines 3", 4", 5", 6", 8' 300-CC (This equipment is part of a photomask alignment exposure machine used in semiconductor lithography process.)

Function: Use UV parallel light source to make 1:1 copy of the pattern of the photomask to the photoresist film on the wafer surface.

The intensity of the light source varies according to the selected wavelength and beam size and shape.

UV LED

■ Equipment Specifications:

  • Exposure light source , mask line width reproduction capability , I-line positive photoresist 1um thickness, hard contact, 1um~2um,
    proximity 3um~5um.

■ Align the imaging system:

  • Automatic alignment ability, the align key with clear geometric shape can be identified within 5um.

■ production :

  • For the alignment process , the exposure time is 3 seconds, and the mechanical capacity is 250 to 300 pieces per hour (without considering the material variability).

  • No alignment, only exposure process, exposure time of 3 seconds, mechanical capacity of 280~360 pieces per hour (without considering material variability and unloading).

■ External Dimensions:

  • W: 1900 x D1600 x H2400mm

■ Weight:

  • Weight about 1900kg